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TROVATO MFG,. INC. SYSTEM
FEATURES |
Trovato |
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A computer controlled and fully automated vacuum
deposition system to be used as a research and
development tool for OLED, photovoltaic cells, or
similar, thin film applications. This system will be
used for: |
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Device optimization |
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Layer thickness studies |
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Consituent ratio studies |
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Dopant concentration studies |
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Material conformance evaluations |
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Encapsulation studies |
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This system will be delivered ready to “plug-and-play.” |
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Integrated frame/chamber/inert environment design with
small footprint |
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The system will be fully tested at our facility, prior
to shipping, including the production of a functioning
OLED device. |
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Pricing shall include delivery and final set-up. |
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The deposition test will be repeated at customer's lab,
prior to final payment. |
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This fully automated system will produce a functional
multi-layered device from a pre-programmed recipe, with
no operator intervention. Control and motion of
substrates, shadow masks, boat source selection and pump
sequencing will all be computer controlled and will not
require any operator interaction. |
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Automated Deposition Control: |
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PC controlled deposition system will utilize Sigma
Instruments SQS-242 Rate/Thickness software, for
automated thin film deposition programming, in
conjucntion with Trovato Custom Software that expands
the capabilities of the Sigma Software: |
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* Programmable for automated layer thickness variant
control. |
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* Programmable for automated constituent ratio variant
control. |
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* 4 rate crystal monitor heads. (Expandable) |
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Custom designed executable program for independent
fixture control. |
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Co-deposition of three materials capability included –
and easily adaptable to quadruple deposition. |
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Eight thermal evaporative sources are standard and
expandable to suit your proceess needs, with: |
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* Two 3 kw power supplies. |
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* One 1 kw power supply |
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Computer controlled high current switch to automate
distribution of the power supply outputs to the eight
thermal source locations, from the power supplies. |
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Automated Substrate Fixture: |
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Six substrate fixture capacity. |
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Three mask fixture with automated mask sequencing
standard |
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Substrate platter rotates for uniform deposition on all
substrates, |
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* substrates can be coated one at a time, in any
automated sequence, for variant studies. |
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* mask changes are computer controlled and achieved
without interrupting the process. |
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Organic and cathode masks are automatically changed and
presented to the substrates without operator
interaction, or breaking vacuum. |
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Substrate shutters will open and close automatically,
according to programmed deposition recipe. |
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Any pneumatic and electrical actuators shall be outside
the vacuum chamber. Any mechanical motion shall be
transmitted via ferrofluidic feedthroughs. |
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Vacuum System: |
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Custom designed executable programming for automated
pump sequencing and auto regeneration of the cryo head. |
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8" cryogenic pump, for maximum water removal and pumping
speed. |
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Cryo pump mounted on the side of the chamber to minimize
contaminant intrusion into the array. |
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Micro-Ion and Convectron gauging. |
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Pneumatically actuated valves with position indicators
for positive feedback and maximum protection for the
vacuum system and process integrity. |
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Vacuum Chamber |
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Custom designed Box chamber, with two doors: the front
door, situated inside the environmental containment
system, will be pneumatically operated and controlled to
open downward, to minimize the space requirements of the
footprint of the system; the rear door is a full access,
swing-out door, for maintenance of the interior of the
chamber. |
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Additional ports for future instrumentation access. |
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Environmental Containment System |
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Environmental containment Glove Box
system included. The system consists of an integral
Glove Box, mounted on the system frame, with an
extension to provide inert atmosphere containment and
full gloved access to the open chamber, when the front
door is open. The glove box can be used for substrate
preparation and encapsulation. |
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Moisture monitoring is included in the glovebox. |
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NOTE: The system is a world-class research deposition
system with an environmental containment system built
around it - it is NOT a glovebox with a small chamber in
it. |
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MISC |
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The system will be constructed on a
custom designed, unitized welded frame for full system
integrity. |
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A 19” color LCD panel monitor will
be mounted on the instrument tower, at eye level, to
provide operator information and feedback. |
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The warranty for this system will extend for a period of
twelve (12) months from the date of delivery. |
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Price includes set-up at your lab. |
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Price includes three days of training at your lab. |
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Telephone support provided. |
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Encapsulation press designed to hot seal an aluminum cap
to a glass substrate in one minute or less. |
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