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TROVATO MFG,. INC. SYSTEM FEATURES |
Trovato |
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A computer controlled and fully automated vacuum deposition system
to be used as a research and development tool for OLED, photovoltaic
cells, or similar, thin film applications. This system will be
used for: |
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Device optimization |
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Layer thickness studies |
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Consituent ratio studies |
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Dopant concentration studies |
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Material conformance evaluations |
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Encapsulation studies |
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This system will be delivered ready to “plug-and-play.” |
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Integrated frame/chamber/inert environment design with small
footprint |
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The system will be fully tested at our facility, prior to shipping,
including the production of a functioning OLED device. |
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Pricing shall include delivery and final set-up. |
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The deposition test will be repeated at customer's lab, prior
to final payment. |
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This fully automated system will produce a functional multi-layered
device from a pre-programmed recipe, with no operator intervention.
Control and motion of substrates, shadow masks, boat source selection
and pump sequencing will all be computer controlled and will
not require any operator interaction. |
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Automated Deposition Control: |
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PC controlled deposition system will utilize Sigma Instruments
SQS-242 Rate/Thickness software, for automated thin film deposition
programming, in conjucntion with Trovato Custom Software that
expands the capabilities of the Sigma Software: |
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* Programmable for automated layer thickness variant control. |
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* Programmable for automated constituent ratio variant control. |
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* 4 rate crystal monitor heads. (Expandable) |
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Custom designed executable program for independent fixture control. |
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Co-deposition of three materials capability included – and
easily adaptable to quadruple deposition. |
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Eight thermal evaporative sources are standard and expandable
to suit your proceess needs, with: |
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* Two 3 kw power supplies. |
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* One 1 kw power supply |
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Computer controlled high current switch to automate distribution
of the power supply outputs to the eight thermal source locations,
from the power supplies. |
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Automated Substrate Fixture: |
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Six substrate fixture capacity. |
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Three mask fixture with automated mask sequencing standard |
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Substrate platter rotates for uniform deposition on all substrates, |
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* substrates can be coated one at a time, in any automated sequence,
for variant studies. |
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* mask changes are computer controlled and achieved without interrupting
the process. |
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Organic and cathode masks are automatically changed and presented
to the substrates without operator interaction, or breaking vacuum. |
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Substrate shutters will open and close automatically, according
to programmed deposition recipe. |
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Any pneumatic and electrical actuators shall be outside the vacuum
chamber. Any mechanical motion shall be transmitted via ferrofluidic
feedthroughs. |
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Vacuum System: |
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Custom designed executable programming for automated pump sequencing
and auto regeneration of the cryo head. |
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CTI Cryotorr 8F cryogenic pump, for maximum water removal and
pumping speed. |
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Cryo pump mounted on the side of the chamber to minimize contaminant
intrusion into the array. |
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Granville Phillips Micro-Ion and Convectron gauging. |
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Pneumatically actuated valves with position indicators for positive
feedback and maximum protection for the vacuum system and process
integrity. |
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Vacuum Chamber |
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Custom designed Box chamber, with two doors: the front door,
situated inside the environmental containment system, will be
pneumatically operated and controleld to open downward, to minimize
the space requirements of the footprint of the system; the rear
door is a full access, swing-out door, for maintenance of the
interior of the chamber. |
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Additional ports for future instrumentation access. |
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Environmental Containment System |
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Environmental containment Glove Box system included. The system
consists of an integral Glove Box, mounted on the system frame,
with an extension to provide inert atmosphere containment and
full gloved access to the open chamber, when the front door is
open. The glove box can be used for substrate preparation and
encapsulation. |
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Moisture monitoring is included in the glovebox. |
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NOTE: The system is a world-class research deposition system
with an environmental containment system built around it - it
is NOT a glovebox with a small chamber in it. |
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MISC |
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The system will be constructed on a custom designed, unitized
welded frame for full system integrity. |
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A 17” color LCD panel monitor will be mounted on the instrument
tower, at eye level, to provide operator information and feedback. |
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The warranty for this system will extend for a period of twelve
(12) months from the date of delivery. |
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Price includes set-up at your lab. |
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Price includes three days of training at your lab. |
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Telephone support provided. |
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Encapsulation press designed to hot seal an aluminum cap to a
glass substrate in one minute or less. |
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